Advanced dielectrics for gate oxide, DRAM and rf capacitors

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 823-828

  van Dover, R B ^a   Fleming, R M ^a   Schneemeyer, L F ^a   Alers, G B ^a   Werder, D J ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CAPACITORS; DYNAMIC RANDOM ACCESS STORAGE; GATES (TRANSISTOR); LEAKAGE CURRENTS; PERMITTIVITY; TANTALUM COMPOUNDS; TITANIUM OXIDES;

AMORPHOUS METAL OXIDES;

DIELECTRIC FILMS;

EID: 0032254848     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)