Static friction and surface roughness studies of surface micromachined electrostatic micromotors using an atomic force/friction force microscope

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1777-1785

  Sundararajan, Sriram ^a   Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84976355631     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.1353539     Document Type: Conference Paper

References (23)

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