Surface characterization and adhesion analysis for polysilicon surface micromachined flaps

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 130-137

  Xue, Xiaojie ^a   Phinney, Leslie M ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Adhesion; Polycrystalline silicon; Sacrificial micromachining; Surface roughness; Tip wear test

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; MICROELECTROMECHANICAL DEVICES; POLYSILICON; STICTION; SURFACE PROPERTIES; SURFACE ROUGHNESS; TRIBOLOGY; WEAR OF MATERIALS;

MICROTRIBOLOGY;

MICROMACHINING;

EID: 0038058948     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472729     Document Type: Conference Paper

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