Adhesion and contact modeling and experiments in microelectromechanical systems including roughness effects

Microsystem Technologies

Volumn 12, Issue 9, 2006, Pages 854-869

  Tayebi, N ^a   Polycarpou, A A ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FRICTION; MICROELECTROMECHANICAL DEVICES; SENSORS; SURFACE ROUGHNESS; THIN FILMS;

CONTACT MODELING; POLYSILICON FILMS; PULL-OFF FORCES; ROOT-MEAN-SQUARE ROUGHNESS (RMS);

ADHESION;

EID: 33745207124     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0169-0     Document Type: Article

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