Integration of a UV curable polymer lens and MUMPs structures on a SOI optical bench

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1703-1709

  Hsieh, Jerwei ^a   Hsiao, Sheng Yi ^b   Lai, Chun Feng ^b   Fang, Weileun ^b  

^a INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

LENSES; MICROACTUATORS; OPTICAL SYSTEMS; ORGANIC POLYMERS; ULTRAVIOLET DEVICES;

BI-CONVEX SPHERICAL POLYMER LENSES; OUT-OF-PLANE OPTICAL AXES; POLYMER LENS; SILICON OPTICAL BENCH;

SILICON ON INSULATOR TECHNOLOGY;

EID: 34547700341     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/037     Document Type: Article

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