Design and fabrication of optical MEMS scanners for optically modulated fiber endoscopes

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Volumn , Issue , 2006, Pages 34-35

  Nakada, M ^a,b   Chong, C ^c   Isamoto, K ^c   Fujita, H ^a   Toshiyoshi, H ^a,b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^c Japan   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROOPTICS; OPTICAL FIBERS; PHOTOVOLTAIC CELLS;

MICROSCANNER; OPTICALLY MODULATED FIBER ENDOSCOPES;

MEMS;

EID: 34547680634     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/omems.2006.1708251     Document Type: Conference Paper

References (4)

1. D. T. McCormick et al., "3-D MEMS Based Minimally Invasive Optical Coherence Tomography", Technical Digest of TRANSDUCERS'05, Seoul.
2. J. T. W. Yeow et al., "Micromachined 2-D scanner for 3-D optical coherent tomography", Sensors and Actuators A 117, pp. 331-340, 2005.
3. C. Chong et al., "Optically Modulated MEMS Scanning Endoscope", IEEE Photon. Tech. Lett. Vol. 18, No. 1, pp. 133-135, 2006.
4. K. Isamoto et al., "Self-Assembly Technique for MEMS Vertical Comb Electrostatic Actuators", IEICE Electronics Express Vol. 2, No 9, pp.311-315, 2005.