A micro lens actuator for optical flying head

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 507-510

  Hata, Seiichi ^a   Yamada, Yutaka ^a   Ichihara, Junichi ^b   Shimokohbe, Akira ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTROSTATIC LENSES; INTEGRATED CIRCUIT MANUFACTURE; MAGNETOOPTICAL DEVICES; METALLIC GLASS; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PALLADIUM COMPOUNDS; STRESS RELAXATION; THIN FILMS;

MAGNETOOPTICAL RECORDING; MICROLENS ACTUATOR; OPTICAL FLYING HEAD; SUPERCOOLED LIQUID REGION; THIN FILM METALLIC GLASS;

ELECTROSTATIC ACTUATORS;

EID: 0036120525     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984320     Document Type: Article

References (7)