Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applications

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1593-1597

  Song, In Hyouk ^a   Peter, Yves Alain ^a   Meunier, Michel ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMMINUTION; ION BEAM LITHOGRAPHY; OPTICAL SYSTEMS; SURFACE ROUGHNESS; SURFACE TREATMENT;

DEEP REACTIVE ION ETCHING (DRIE); SURFACE REFLECTIVITY;

MICROSTRUCTURE;

EID: 34547681668     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/023     Document Type: Article

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