High-aspect ratio vertical comb-drive actuator with small self-aligned finger gaps

Journal of Microelectromechanical Systems

Volumn 14, Issue 5, 2005, Pages 1144-1155

  Carlen, Edwin T ^a,b   Heng, Khee Hang ^a   Bakshi, Shivalik ^a   Pareek, Ajay ^a   Mastrangelo, Carlos H ^a,c  

^a Corning Intellisense Corporation ^*  (United States)

^b CHARLES STARK DRAPER LABORATORY   (United States)

^c CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

Dry silicon release; Epipoly; Self aligned process; Vertical comb drive

Indexed keywords

ASPECT RATIO; CONDUCTIVE MATERIALS; DIELECTRIC MATERIALS; MICROACTUATORS; MIRRORS; OPTICAL COMMUNICATION; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SEMICONDUCTING FILMS; SILICON ON INSULATOR TECHNOLOGY;

DRY SILICON RELEASE; EPIPOLY FILMS; SELF-ALIGNED PROCESS; VERTICAL COMB-DRIVE ACTUATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 27644565563     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.851837     Document Type: Article

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