Micromachined accelerometer with no proof mass

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 899-902

  Leung, Albert M ^a   Jones, John ^a   Czyzewska, Eva ^a   Chen, Jianming ^a   Pascal, Maria ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINED ACCELEROMETERS;

BUBBLES (IN FLUIDS); MICROMACHINING; NATURAL CONVECTION;

ACCELEROMETERS;

EID: 84886448068     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)