Improvements in the device characteristics of polycrystalline silicon thin-film transistors on stainless steel by UV treatment

Journal of the Electrochemical Society

Volumn 154, Issue 9, 2007, Pages

  Jeong, Jae Kyeong ^a   Shin, Hyun Soo ^a   Kim, Minkyu ^a   Lee, Choong Ho ^a   Jeon, Yoon Cheol ^a   Jin, Dong Un ^a   Mo, Yeon Gon ^a   Kim, Hye Dong ^a   Chung, Ho Kyoon ^a  

^a Samsung SDI   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELECTRON MOBILITY; GATE DIELECTRICS; POLYSILICON; STAINLESS STEEL; ULTRAVIOLET RADIATION;

GATE DIELECTRIC FILMS; ROUGH STAINLESS STEELS; STAINLESS STEEL FOILS; SUBTHRESHOLD GATE SWING;

THIN FILM TRANSISTORS;

EID: 34547526018     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2755673     Document Type: Article

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