Polysilicon TFT AM-OLED on thin flexible metal substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5004, Issue , 2003, Pages 187-191

  Afentakis, Themis ^a   Hatalis, Miltiadis ^a   Voutsas, Tolis ^b   Hartzell, John ^b  

^a LEHIGH UNIVERSITY   (United States)

^b SHARP LABORATORIES OF AMERICA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYSTALLIZATION; LIGHT EMITTING DIODES; LIQUID CRYSTAL DISPLAYS; MICROELECTRONIC PROCESSING; POLYSILICON; SUBSTRATES;

ROLL-TO-ROLL PROCESSING;

THIN FILM TRANSISTORS;

EID: 0042360557     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482577     Document Type: Conference Paper

References (4)

1. S. Wagner et al., 1997 Symposium on Amorphous and Microcrystalline Silicon Technology, pp.843-849, (1997)
2. D. Stryahilev, A. Sazonov, A. Nathan, Journal of Vacuum Science & Technology A (Vacuum, Surfaces, and Films), Vol. 20, p. 1087, (2002)
3. P. Kazlas et al., 22nd International Display Research Conference, p. 259, (2002)
4. K. Kato et. al., IEICE Transactions on Electronics, Vol. E80-C, No. 2, pp320-326, (1997)