Sub-100°C a-Si:H thin-film transistors on plastic substrates with silicon nitride gate dielectrics

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 5, 2004, Pages 2052-2055

  Sazonov, A ^a   McArthur, C ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; METALLIZING; PARAMETER ESTIMATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; TEMPERATURE MEASUREMENT;

DEPOSITION TEMPERATURES; GATE DIELECTRICS; PLASTIC SUBSTRATES; THERMAL DEFORMATION;

THIN FILM TRANSISTORS;

EID: 8444248939     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1784826     Document Type: Review

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