Multireflection effect on formation of periodic surface structure on an Si film melting-crystallized by a linearly polarized Nd:YAG pulse laser beam

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 6 A, 2007, Pages 3527-3533

  Horita, Susumu ^a   Kaki, Hirokazu ^a,b   Nishioka, Kensuke ^a  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b NISSIN ELECTRIC CO LTD   (Japan)

Author keywords

Crystallization; Green laser; Multireflection; Si film; TFT; YAG laser

Indexed keywords

CRYSTALLIZATION; GLASS; LASER BEAMS; LIGHT REFLECTION; SUBSTRATES; SURFACE STRUCTURE;

GREEN LASER; MULTIREFLECTION;

SOLID STATE LASERS;

EID: 34547217468     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.3527     Document Type: Article

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