Periodic grain-boundary formation in a poly-Si thin film crystallized by linearly polarized Nd:YAG pulse laser with an oblique incident angle

Journal of Applied Physics

Volumn 97, Issue 1, 2005, Pages

  Kaki, Hirokazu ^a   Horita, Susumu ^a  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DENSITY; GLASS SUBSTRATES; LIQUID VISCOSITY; PULSE LASER ANNEALING (PLA);

ANGLE MEASUREMENT; CRYSTALLIZATION; GRAIN BOUNDARIES; LASER BEAM EFFECTS; LASER PULSES; MATHEMATICAL MODELS; MELTING; POLARIZATION; SURFACE ROUGHNESS; TEMPERATURE DISTRIBUTION; THIN FILMS; VISCOSITY;

POLYSILICON;

EID: 19944432417     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1827915     Document Type: Article

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