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Volumn 38, Issue 10 A, 1999, Pages
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Polycrystalline silicon thin films produced by interference laser crystallization of amorphous silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
ATOMIC FORCE MICROSCOPY;
CRYSTALLIZATION;
GRAIN SIZE AND SHAPE;
LIGHT INTERFERENCE;
POLYCRYSTALLINE MATERIALS;
PULSED LASER APPLICATIONS;
SEMICONDUCTING SILICON;
THIN FILMS;
INTERFERENCE LASER CRYSTALLIZATION;
SEMICONDUCTING FILMS;
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EID: 0033327126
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.38.l1083 Document Type: Article |
Times cited : (35)
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References (8)
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