SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Electrochemical and Solid-State Letters

Volumn 10, Issue 9, 2007, Pages 264-266

Influence of F+ Co-implants on EOR defect formation in B + -implanted, ultrashallow junctions

(5) Boninelli, S a Cristiano, F a Lerch, W b,d,e Paul, S b,d,e Cowern, N E B c

a UNIVERSITÉ DE TOULOUSE (France)

b MATTSON THERMAL PRODUCTS GMBH (United States)

c UNIVERSITY OF SURREY (United Kingdom)

d UNIVERSITY OF CATANIA (Italy)

e ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; DIFFUSION; GERMANIUM COMPOUNDS; SILICON COMPOUNDS;

ELECTRICAL DEACTIVATION; END-OF-RANGE (EOR) DEFECTS; TRANSIENT ENHANCED DIFFUSION;

ION IMPLANTATION;

EID: 34547178226 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.2751837 Document Type: Article

Times cited : (3)

References (18)

1
- 0001633650
- D. F. Downey, J. W. Chow, E. Ishida, and K. S. Jones, Appl. Phys. Lett., 73, 1263 (1998).
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1263
- Downey, D.F.¹ Chow, J.W.² Ishida, E.³ Jones, K.S.⁴

2
- 79955989428
- A. Mokhberi, R. Kasnavi, P. B. Griffin, and J. D. Plummer, Appl. Phys. Lett., 80, 3530 (2002).
- (2002) Appl. Phys. Lett. , vol.80 , pp. 3530
- Mokhberi, A.¹ Kasnavi, R.² Griffin, P.B.³ Plummer, J.D.⁴

3
- 1842738137
- G. Impellizzeri, J. H. R. dos Santos, S. Mirabella, F. Priolo, E. Napolitani, and A. Carnera, Appl. Phys. Lett., 84, 1862 (2004).
- (2004) Appl. Phys. Lett. , vol.84 , pp. 1862
- Impellizzeri, G.¹ Dos Santos, J.H.R.² Mirabella, S.³ Priolo, F.⁴ Napolitani, E.⁵ Carnera, A.⁶

4
- 17944374217
- N. E. B. Cowern, B. Colombeau, J. Benson, A. J. Smith, W. Lerch, S. Paul, T. Graf, F. Cristiano, X. Hebras, and D. Bolze, Appl. Phys. Lett., 86, 101905 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 101905
- Cowern, N.E.B.¹ Colombeau, B.² Benson, J.³ Smith, A.J.⁴ Lerch, W.⁵ Paul, S.⁶ Graf, T.⁷ Cristiano, F.⁸ Hebras, X.⁹ Bolze, D.¹⁰

5
- 17944381348
- S. Mirabella, G. Impellizzeri, E. Bruno, L. Romano, M. G. Grimaldi, F. Priolo, E. Napolitani, and A. Carnera, Appl. Phys. Lett., 86, 121905 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 121905
- Mirabella, S.¹ Impellizzeri, G.² Bruno, E.³ Romano, L.⁴ Grimaldi, M.G.⁵ Priolo, F.⁶ Napolitani, E.⁷ Carnera, A.⁸

6
- 11144354575
- B. J. Pawlak, R. Surdeanu, B. Colombeau, A. J. Smith, N. E. B. Cowern, R. Lindsay, W. Vandervorst, B. Brijs, O. Richard, and F. Cristiano, Appl. Phys. Lett., 84, 2055 (2004).
- (2004) Appl. Phys. Lett. , vol.84 , pp. 2055
- Pawlak, B.J.¹ Surdeanu, R.² Colombeau, B.³ Smith, A.J.⁴ Cowern, N.E.B.⁵ Lindsay, R.⁶ Vandervorst, W.⁷ Brijs, B.⁸ Richard, O.⁹ Cristiano, F.¹⁰

7
- 0242409648
- M. Diebel, S. Chakravarthi, S. T. Dunham, C. F. Machala, S. Ekbote, and A. Jain, Mater. Res. Soc. Symp. Proc., 765, D6.15.1 (2003).
- (2003) Mater. Res. Soc. Symp. Proc. , vol.765 , pp. 6151
- Diebel, M.¹ Chakravarthi, S.² Dunham, S.T.³ MacHala, C.F.⁴ Ekbote, S.⁵ Jain, A.⁶

8
- 0022988998
- A. E. Michel, Mater. Res. Soc. Symp. Proc., 52, 3 (1986).
- (1986) Mater. Res. Soc. Symp. Proc. , vol.52 , pp. 3
- Michel, A.E.¹

9
- 21644461416
- Springer-Verlag, Wien
- P. Pichler, Intrinsic Point Defects, Impurities and their Diffusion in Silicon, Springer-Verlag, Wien (2004).
- (2004) Intrinsic Point Defects, Impurities and Their Diffusion in Silicon
- Pichler, P.¹

10
- 0037744330
- S. Takeda and M. J. Kohyama, Inst. Phys. Conf. Ser., 134, 33 (1993).
- (1993) Inst. Phys. Conf. Ser. , vol.134 , pp. 33
- Takeda, S.¹ Kohyama, M.J.²

11
- 0037744553
- A. Claverie, B. Colombeau, B. De Mauduit, C. Bonafos, X. Hebras, G. Ben Assayag, and F. Cristiano, Appl. Phys. A, 76, 1025 (2003).
- (2003) Appl. Phys. A , vol.76 , pp. 1025
- Claverie, A.¹ Colombeau, B.² De Mauduit, B.³ Bonafos, C.⁴ Hebras, X.⁵ Ben Assayag, G.⁶ Cristiano, F.⁷

12
- 33750154232
- S. Boninelli, N. Cherkashin, A. Claverie, and F. Cristiano, Appl. Phys. Lett., 89, 161904 (2005).
- (2005) Appl. Phys. Lett. , vol.89 , pp. 161904
- Boninelli, S.¹ Cherkashin, N.² Claverie, A.³ Cristiano, F.⁴

13
- 0001495423
- C. Bonafos, M. Omri, B. De Mauduit, G. Ben Assayag, A. Claverie, D. Alquier, A. Martinez, and D. Mathiot, J. Appl. Phys., 82, 2855 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 2855
- Bonafos, C.¹ Omri, M.² De Mauduit, B.³ Ben Assayag, G.⁴ Claverie, A.⁵ Alquier, D.⁶ Martinez, A.⁷ Mathiot, D.⁸

14
- 0011962825
- C. Bonafos, D. Mathiot, and A. Claverie, J. Appl. Phys., 83, 3008 (1998).
- (1998) J. Appl. Phys. , vol.83 , pp. 3008
- Bonafos, C.¹ Mathiot, D.² Claverie, A.³

15
- 0031643511
- D. Alquier, N. E. B. Cowern, P. Pichler, C. Armand, A. Martinez, D. Mathiot, M. Omri, and A. Claverie, Mater. Res. Soc. Symp. Proc., 532, 67 (1998).
- (1998) Mater. Res. Soc. Symp. Proc. , vol.532 , pp. 67
- Alquier, D.¹ Cowern, N.E.B.² Pichler, P.³ Armand, C.⁴ Martinez, A.⁵ Mathiot, D.⁶ Omri, M.⁷ Claverie, A.⁸

16
- 0037526503
- X. D. Pi, C. P. Burrows, and P. G. Coleman, Phys. Rev. Lett., 90, 155901 (2003).
- (2003) Phys. Rev. Lett. , vol.90 , pp. 155901
- Pi, X.D.¹ Burrows, C.P.² Coleman, P.G.³

17
- 4944249572
- P. J. Simpson, Z. Jenei, P. Asoka-Kumar, R. R. Robinson, and M. E. Law, Appl. Phys. Lett., 85, 1538 (2004).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 1538
- Simpson, P.J.¹ Jenei, Z.² Asoka-Kumar, P.³ Robinson, R.R.⁴ Law, M.E.⁵

18
- 33750460908
- S. Boninelli, A. Claverie, G. Impellizzeri, S. Mirabella, F. Priolo, E. Napoletani, and F. Cristiano, Appl. Phys. Lett., 89, 171916 (2006).
- (2006) Appl. Phys. Lett. , vol.89 , pp. 171916
- Boninelli, S.¹ Claverie, A.² Impellizzeri, G.³ Mirabella, S.⁴ Priolo, F.⁵ Napoletani, E.⁶ Cristiano, F.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.