Review of micromachined thermopiles for infrared detection

Measurement Science and Technology

Volumn 18, Issue 7, 2007, Pages

  Graf, A ^a   Arndt, M ^a   Sauer, M ^a   Gerlach, G ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Infrared; Micromachined; Optical; Review; Seebeck; Sensor; Thermal detector; Thermocouple; Thermoelectric; Thermopile

Indexed keywords

INFRARED RADIATION; MICROMACHINING; SEEBECK EFFECT; SENSORS;

MATERIAL SYSTEMS; NOISE SOURCES; THERMOPILE DETECTORS;

THERMOCOUPLES;

INFRARED RADIATION; MICROMACHINING; SEEBECK EFFECT; SENSORS; THERMOCOUPLES;

EID: 34250755924     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/7/R01     Document Type: Review

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