Fabrication of poly-Ge-based thermopiles on plastic

IEEE Sensors Journal

Volumn 4, Issue 6, 2004, Pages 743-748

  Makki, Bahareh Sadeghi ^a   Moradi, Maryam ^b   Moafi, Ali ^a   Mohajerzadeh, Shams ^a   Hekmatshoar, Bahman ^a   Shahrjerdi, Davood ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

^b UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Flexible substrates; Ge thermocouples; Micromachining; Polyethylene terephthalate (PET) etching; Ultraviolet illumination

Indexed keywords

AMORPHOUS FILMS; ETCHING; FABRICATION; GERMANIUM; MICROMACHINING; PLASTICS; POLYCRYSTALLINE MATERIALS; POLYETHYLENE TEREPHTHALATES; SCANNING ELECTRON MICROSCOPY; THERMOCOUPLES; X RAY DIFFRACTION ANALYSIS;

FLEXIBLE SUBSTRATES; GE THERMOCOUPLES; ULTRAVIOLET ILLUMINATION;

THERMOPILES;

EID: 10044298305     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2004.836862     Document Type: Article

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