Investigation of thermopile using CMOS compatible process and front-side Si bulk etching

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4176, Issue , 2000, Pages 168-178

  Du, Chen Hsun ^a   Lee, Chengkuo ^a  

^a Science Based Industrial Park   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; ETCHING; POLYCRYSTALLINE MATERIALS; SILICON; THERMAL CONDUCTIVITY; THERMOELECTRICITY;

BULK ETCHING;

THERMOPILES;

EID: 0034546735     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.395625     Document Type: Conference Paper

References (8)