A bulk micromachined silicon thermopile with high sensitivity

Sensors and Actuators, A: Physical

Volumn 104, Issue 1, 2003, Pages 32-39

  Allison, S C ^a   Smith, R L ^a   Howard, D W ^a   Gonzalez C ^a,b   Collins, S D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b ABBOTT LABORATORIES   (United States)

Author keywords

Microfabrication; Temperature sensor; Thermopiles

Indexed keywords

MICROMACHINING; SEEBECK EFFECT; SEMICONDUCTOR JUNCTIONS; SENSITIVITY ANALYSIS; SILICON WAFERS; THERMOPILES;

TEMPERATURE SENSORS;

SENSORS;

EID: 0037445452     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00478-8     Document Type: Article

References (26)

1. T.H. Geballe, G.W. Hull, Seebeck effect in silicon, Phys. Rev. 98 (4) (1955) 940-947.
2. C. Herring, Theory of the thermoelectric power of semiconductors, Phys. Rev. 96 (5) (1954) 1163-1187.
3. G.R. Lahiji, K.D. Wise, A batch fabricated silicon thermopile infrared detector, IEEE Trans. Electron Devices ED-29 (1) (1982) 14-22.
4. G.D. Nieveld, Thermopiles fabricated using silicon planar technology, Sens. Actuators 3 (1983) 179-183.
5. A.W. Van Herwaarden, P.M. Sarro, Thermal sensors based on the Seebeck effect, Sens. Actuators 10 (1986) 321-346.
6. A.W. Van Herwaarden, The Seebeck effect in silicon IC's, Sens. Actuators 6 (1984) 245-254.
7. A.W. Van Herwaarden, P.M. Sarro, Performance of integrated thermopile vacuum sensors, J. Phys. Electron. 21 (1989) 1162-1167.
8. A.W. Van Herwaarden, D.C. Van Duyn, B.W. Van Oudheusden, P.M. Sarro, Integrated thermopile sensors, Sens. Actuators A21-A23 (1989) 621-630.
9. T. Toriyama, M. Yajima, S. Sugiyama, Thermoelectric micropower generator utilizing self-standing polysilicon-metal thermopile, in: Proceedings of the 14th Annual IEEE International Conference on Microelectromechanical Systems, Interlaken, Switzerland, 2001.
10. R. Muanghlua, S. Cheirsirikul, S. Supadech, The study of silicon thermopile, in: Proceedings of the 2000 Tencon: Intelligent Systems and Technologies for the New Millenium, Kuala Lampur, Malaysia, 2000.
11. P.M. Sarro, H. Yashiro, A.W. Van Herwaarden, S. Middelhoek, An infrared sensing array based on integrated silicon thermopiles, Sens. Actuators 14 (1988) 191-201.
12. R. Lenggenhager, H. Baltes, J. Peer, M. Forster, Thermoelectric infrared sensors by CMOS technology, IEEE Electron Device Lett. 13 (9) (1992) 454-456.
13. R. Lenggenhager, H. Baltes, T. Elbel, Thermoelectric infrared sensors in CMOS technology, Sens. Actuators 37-38 (1993) 216-220.
14. T.M. Berlicki, S.J. Osadnik, E.L. Prociow, Vacuum pressure thermal thin-film sensor, Vacuum 53 (1999) 373-376.
15. B.W. Van Oudheusden, Silicon flow sensors, Proc. IEED 135 (1988) 373-380.
16. D. Moser, H. Baltes, A high sensitivity CMOS gas flow sensor on a thin dielectric membrane, Sens. Actuators 37-38 (1993) 33-37.
17. L. Brunetti, E. Monticore, G. Gervino, Thin film thermopiles in microcalorimeters, Sens. Actuators A25 (1991) 633-636.
18. B.E. Handy, S.B. Sharma, B.E. Spiewak, J.A. Dumesic, A Tian-Calvet heat-flux microcalorimeter for measurement of differential heats of adsorption, Meas. Sci. Technol. 4 (1993) 1350-1356.
19. K. Verhaegen, K. Baert, Fabrication and modeling of a silicon microcalorimeter, in: Proceedings of the 11th International Conference on Microelectronics, Safat, Kuwait, 1999.
20. C. González, R.L. Smith, D.G. Howitt, S.D. Collins, MicroJoinery: concept, definition, and applications to microsystem development, Sens. Actuators 66 (1998) 315-332.
21. S. Middlehoek, S.A. Audet, Silicon Sensors, Harcourt, Brace and Jovanovich, New York, 1989.
22. J.H. Kiely, D.V. Morgan, D.M. Rowe, The design and fabrication of a miniature thermoelectric generator using MOS process techniques, Meas. Sci. Technol. 5 (1994) 182-189.
23. J.D. Plummer, M.D. Deal, P.B. Griffin, in: Silicon VLSI Technology: Fundamentals, Practice, Modeling, Prentice Hall, Englewood Cliffs, NJ, 2000, pp. 688-695.
24. G. Wachutka, R. Lenggenhager, D. Moser, H. Baltes, Analytical 2D-model of CMOS micromachined gas flow sensors, in: Proceedings of the Transducers 91 International Conference on Solid-State Sensors and Actuators, Digest Technical Papers, pp. 22-25.
25. D.R. Lide (Ed.), CRC Handbook of Chemistry and Physics, 81st edition, CRC Press, Boca Raton, FL, 2000.
26. T. Akin, Z. Olgun, O. Akar, H. Kulah, An integrated thermopile structure with high responsivity using any standard CMOS technology, Sens. Actuators A 66 (1998) 218-224.