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Volumn 1, Issue , 2003, Pages 754-757

A novel type of metal-on-polymer micromachined thermopile

Author keywords

Chemical and biological sensors; Chromium alloys; Coatings; Fabrication; Gas detectors; Infrared detectors; Infrared sensors; Injection molding; Polymers; Silicon

Indexed keywords

ACTUATORS; CHEMICAL DETECTION; CHROMIUM ALLOYS; COATINGS; FABRICATION; GAS DETECTORS; INFRARED DETECTORS; INJECTION MOLDING; METALS; MICROSYSTEMS; MOLDING; PLASTIC COATINGS; POLYMERS; REINFORCED PLASTICS; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON DETECTORS; SILICON WAFERS; THERMOCOUPLES; THERMOPILES; TRANSDUCERS;

EID: 84944724510     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215583     Document Type: Conference Paper
Times cited : (1)

References (4)
  • 1
    • 84944801537 scopus 로고    scopus 로고
    • http://www.opto.perkinelmer.com/Downloads/Gas-detection.pdf
  • 2
    • 84944801538 scopus 로고    scopus 로고
    • Method of component manufacture
    • U.S. Patent
    • U.S. Patent No. 6,372,542. "Method of component manufacture", H. Martin and O. Öhman.
    • Martin, H.1    Öhman, O.2
  • 4
    • 84944801539 scopus 로고    scopus 로고
    • http://www.senseair.se


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.