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Volumn 1, Issue , 2003, Pages 754-757
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A novel type of metal-on-polymer micromachined thermopile
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Author keywords
Chemical and biological sensors; Chromium alloys; Coatings; Fabrication; Gas detectors; Infrared detectors; Infrared sensors; Injection molding; Polymers; Silicon
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Indexed keywords
ACTUATORS;
CHEMICAL DETECTION;
CHROMIUM ALLOYS;
COATINGS;
FABRICATION;
GAS DETECTORS;
INFRARED DETECTORS;
INJECTION MOLDING;
METALS;
MICROSYSTEMS;
MOLDING;
PLASTIC COATINGS;
POLYMERS;
REINFORCED PLASTICS;
SCANNING ELECTRON MICROSCOPY;
SILICON;
SILICON DETECTORS;
SILICON WAFERS;
THERMOCOUPLES;
THERMOPILES;
TRANSDUCERS;
BIOLOGICAL REACTION;
CHEMICAL AND BIOLOGICAL SENSORS;
FABRICATION AND CHARACTERIZATIONS;
HAND-HELD GAS SENSOR;
INFRA-RED SENSOR;
NOISE EQUIVALENT POWER;
THERMOPLASTIC MATERIALS;
VOLTAGE DEPENDENCIES;
SOLID-STATE SENSORS;
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EID: 84944724510
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2003.1215583 Document Type: Conference Paper |
Times cited : (1)
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References (4)
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