A novel type of metal-on-polymer micromachined thermopile

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 754-757

  Bergman, D ^a   Nikolajeff, F ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Chemical and biological sensors; Chromium alloys; Coatings; Fabrication; Gas detectors; Infrared detectors; Infrared sensors; Injection molding; Polymers; Silicon

Indexed keywords

ACTUATORS; CHEMICAL DETECTION; CHROMIUM ALLOYS; COATINGS; FABRICATION; GAS DETECTORS; INFRARED DETECTORS; INJECTION MOLDING; METALS; MICROSYSTEMS; MOLDING; PLASTIC COATINGS; POLYMERS; REINFORCED PLASTICS; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON DETECTORS; SILICON WAFERS; THERMOCOUPLES; THERMOPILES; TRANSDUCERS;

BIOLOGICAL REACTION; CHEMICAL AND BIOLOGICAL SENSORS; FABRICATION AND CHARACTERIZATIONS; HAND-HELD GAS SENSOR; INFRA-RED SENSOR; NOISE EQUIVALENT POWER; THERMOPLASTIC MATERIALS; VOLTAGE DEPENDENCIES;

SOLID-STATE SENSORS;

EID: 84944724510     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215583     Document Type: Conference Paper

References (4)

1. http://www.opto.perkinelmer.com/Downloads/Gas-detection.pdf
2. U.S. Patent No. 6,372,542. "Method of component manufacture", H. Martin and O. Öhman.
3. O. Rötting, W. Röpke, H. Becker, and C. Gärtner, "Polymer microfabrication technologies," Microsystem Technologies 8, pp 32-36, 2002.
4. http://www.senseair.se