Optimal design and noise considerations of CMOS compatible IR thermoelectric sensors

Sensors and Actuators, A: Physical

Volumn 71, Issue 1-2, 1998, Pages 107-115

  Socher, E ^a   Degani, O ^a   Nemirovsky, Y ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Design optimization; Microsystems; Sensor modeling; Thermopiles

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; OPTIMIZATION; SIGNAL TO NOISE RATIO;

DESIGN OPTIMIZATION; THERMOELECTRIC SENSORS;

THERMOPILES;

EID: 0032207481     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00179-4     Document Type: Article

References (15)

1. G.R. Lahiji, K.D. Wise, A batch-fabricated silicon thermopile infrared detector, IEEE Trans. Electron Devices ED-29 (1982).
2. I.H. Choi, K.D. Wise, A silicon-thermopile-based infrared sensing for use in automated manufacturing, IEEE Trans. Electron Devices ED-33 (1986).
3. A.W. van Herwaarden, P.M. Sarro, Thermal sensors based on Seebeck effect, Sensors and Actuators 10 (1986) 321.
4. F. Volklein, A. Wiengand, High sensitivity radiation thermopiles made of Bi-Sb-Te films, Sensors and Actuators A 29 (1991) 87.
5. D. Burgess Jr., M. Yust, K.G. Kreider, Transient thermal response of plasma-sprayed zirconia measured with thin-film thermocouples, Sensors and Actuators A 24 (1990) 155-161.
6. M. Paramaswaran, H. Baltes, L. Ritsik, A. Dhaded, A. Robinson, A new approach for the fabrication of micromechanical structures, Sensors and Actuators 19 (1989) 289-310.
7. D. Moser, R. Lenggenhager, H. Baltes, Silicon gas flow sensors using industrial CMOS and bipolar technology, Sensors and Actuators A 21-23 (1990) 1019-1022.
8. R. Reay, E. Klaassen, G. Kovacs, Thermally and electrically isolated single crystal structures in CMOS technology, IEEE Electron Device Lett. 15 (1994) 399-401.
9. R. Lenggenhager, H. Baltes, T. Elbel, Thermoelectric infrared sensors in CMOS technology, Sensors and Actuators A 37-38 (1993) 216-220.
10. J. Schieferdecker, R. Quad, E. Holzenkampfer, M. Schulze, Infrared thermopile sensors with high sensitivity and very low temperature coefficient, Sensors and Actuators A 46-47 (1995) 422-427.
11. C.G. Jakobson, I. Bloom, Y. Nemirovsky, 1/f noise in CMOS transistors for analog application from subthreshold to saturation, J. Solid State Electron., to be published.
12. C.G. Jakobson, Y. Nemirovsky, CMOS low noise switched charge sensitive preamplifier for CdTe and CdZnTe X-ray detectors, IEEE Trans. Nucl. Sci. 44 (1997) 20-25.
13. G.C.M. Meijer, A.W. Herwaarden, Thermal Sensors, IOP, Bristol, 1994.
14. R.H. Kingston, Detection of Optical and Infrared Radiation, Springer-Verlag, New York, 1978.
15. R.F. Voss, J. Clarke, 1/f noise from system in thermal equilibrium, Phys. Rev. Lett. 36 (1) (1976) 42-45.