A silicon micromachined flow sensor using thermopiles for heat transfer measurements

IEEE Transactions on Instrumentation and Measurement

Volumn 52, Issue 4, 2003, Pages 1155-1159

  Oda, Seiji ^a   Anzai, Mitsuyoshi ^a   Uematsu, Shoichi ^a   Watanabe, Kenzo ^b  

^a YAZAKI CORPORATION   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Flow sensor; Heat transfer; Normalization; Silicon micromachining; Thermopiles

Indexed keywords

FLOW MEASUREMENT; FLOWMETERS; HEAT TRANSFER; SILICON SENSORS; THERMOPILES;

FLOW SENSOR; HEAT TRANSFER MEASUREMENTS;

TEMPERATURE MEASUREMENT;

EID: 0141954136     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2003.815997     Document Type: Article

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