Structural control of oligomeric methyl silsesquioxane precursors and their thin-film properties

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 40, Issue 10, 2002, Pages 1560-1571

  Lee, Long Hua ^a   Chen, Wen Chang ^a   Liu, Wei Chih ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Curing of polymers; Dielectric properties; Oligomers; Polysiloxanes; Thin films

Indexed keywords

CONDENSATION REACTIONS; DIELECTRIC PROPERTIES; HYDROLYSIS; KETONES; MOLECULAR STRUCTURE; PH; PLASTIC FILMS; REFRACTIVE INDEX; SILANES; SILICONES; SOLVENTS; THIN FILMS;

CAGE STRUCTURES; METHYL ISOBUTYL KETONE; METHYL TRIMETHOXYSILANE; MOLAR RATIO; NETWORK STRUCTURES; OLIGOMERIC METHYL SILSEQUIOXANE PRECURSORS; TETRAHYDROFURAN;

OLIGOMERS;

CURING; DIELECTRIC PROPERTY; FILM; OLIGOMER; PRECURSOR;

EID: 0037094224     PISSN: 0887624X     EISSN: None     Source Type: Journal    
DOI: 10.1002/pola.10246     Document Type: Article

References (24)