Novel inorganic - Organic hybrid block copolymers as pore generators for nanoporous ultralow-dielectric-constant films

Macromolecules

Volumn 38, Issue 3, 2005, Pages 1031-1034

  Ro, Hyun Wook ^a   Kim, Kook Ji ^a   Theato, Patrick ^b   Gidley, David W ^c   Yoon, Do Y ^a  

^a Seoul National University   (South Korea)

^b JOHANNES GUTENBERG UNIVERSITY   (Germany)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FUNCTIONALIZATION; NANOPOROSITY; OCTAMERIC STRUCTURE; POROGENS;

ALCOHOLS; CHEMICAL VAPOR DEPOSITION; CONDENSATION; DIELECTRIC FILMS; LOGIC DEVICES; MOLECULAR STRUCTURE; MOLECULAR WEIGHT; NANOSTRUCTURED MATERIALS; PERMITTIVITY; PHASE SEPARATION; POLYMERIZATION; POLYMETHYL METHACRYLATES; POROSITY; THIN FILMS; WATER;

BLOCK COPOLYMERS;

EID: 13444261362     PISSN: 00249297     EISSN: None     Source Type: Journal    
DOI: 10.1021/ma048353w     Document Type: Article

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