메뉴 건너뛰기




Volumn 3, Issue 1, 2004, Pages 53-57

Fracture of nanoporous thin-film glasses

Author keywords

[No Author keywords available]

Indexed keywords

BIOTECHNOLOGY; DUCTILITY; ENERGY DISSIPATION; FRACTURE; HYDROGEN PEROXIDE; MICROELECTRONICS; PLASTIC DEFORMATION; REACTION KINETICS; SOLUTIONS; STRESS CORROSION CRACKING; THIN FILMS;

EID: 0346686074     PISSN: 14761122     EISSN: None     Source Type: Journal    
DOI: 10.1038/nmat1037     Document Type: Article
Times cited : (83)

References (37)
  • 1
    • 0032166845 scopus 로고    scopus 로고
    • Templating nanoporosity in thin-film dielectric insulators
    • Hedrick, J. et al. Templating nanoporosity in thin-film dielectric insulators. Adv. Mater. 10, 1049-1053 (1998).
    • (1998) Adv. Mater. , vol.10 , pp. 1049-1053
    • Hedrick, J.1
  • 3
    • 0035828566 scopus 로고    scopus 로고
    • Adsorption - From theory to practice
    • Dabrowski, A. Adsorption - from theory to practice, Adv. Colloid Interface Sci. 93, 135-224 (2001).
    • (2001) Adv. Colloid Interface Sci. , vol.93 , pp. 135-224
    • Dabrowski, A.1
  • 4
    • 0001088013 scopus 로고    scopus 로고
    • Low-dielectric, nanoporous organosilkate films prepared via inorganic/organic polymer hybrid templates
    • Nguyen, C. et al. Low-dielectric, nanoporous organosilkate films prepared via inorganic/organic polymer hybrid templates. Chem. Mater. 11, 3080-3085 (1999).
    • (1999) Chem. Mater. , vol.11 , pp. 3080-3085
    • Nguyen, C.1
  • 5
    • 0033745601 scopus 로고    scopus 로고
    • Hyperbranched polyesters as nanoporosity templating agents for organosilicates
    • Nguyen, C. et al. Hyperbranched polyesters as nanoporosity templating agents for organosilicates. Macromolecules 33, 4281-4284 (2000).
    • (2000) Macromolecules , vol.33 , pp. 4281-4284
    • Nguyen, C.1
  • 7
    • 0033990021 scopus 로고    scopus 로고
    • Adhesion and reliability of copper interconnects with Ta and TaN barrier layers
    • Lane, M., Dauskardt, R. H., Krishna, N. & Hashim, I. Adhesion and reliability of copper interconnects with Ta and TaN barrier layers. J. Mater. Res. 13, 203-211 (2000).
    • (2000) J. Mater. Res. , vol.13 , pp. 203-211
    • Lane, M.1    Dauskardt, R.H.2    Krishna, N.3    Hashim, I.4
  • 8
    • 0032148208 scopus 로고    scopus 로고
    • Adhesion and debonding of multi-layer thin film structures
    • Dauskardt, R. H., Lane, M., Ma, Q. & Krishna, N. Adhesion and debonding of multi-layer thin film structures, Eng. Fract. Mech. 61, 141-162 (1998).
    • (1998) Eng. Fract. Mech. , vol.61 , pp. 141-162
    • Dauskardt, R.H.1    Lane, M.2    Ma, Q.3    Krishna, N.4
  • 9
    • 0000434759 scopus 로고    scopus 로고
    • Stress-corrosion cracking of low-dielectric-constant spin-on-glass thin Rims
    • Cook, R. & Liniger, E. Stress-corrosion cracking of low-dielectric-constant spin-on-glass thin Rims. J. Electrochcm. Soc. 146, 4439-4448 (1999).
    • (1999) J. Electrochcm. Soc. , vol.146 , pp. 4439-4448
    • Cook, R.1    Liniger, E.2
  • 10
    • 84977695915 scopus 로고
    • Influence of water vapor on crack propagation in soda lime glass
    • Wiederhorn, S. M. Influence of water vapor on crack propagation in soda lime glass. J. Am. Ceram. Soc. 50, 407-414 (1967).
    • (1967) J. Am. Ceram. Soc. , vol.50 , pp. 407-414
    • Wiederhorn, S.M.1
  • 11
    • 0014868714 scopus 로고
    • Stress corrosion and static fatigue of glass
    • Wiederhorn, S. M. & Bolz, L. H. Stress corrosion and static fatigue of glass. J. Am. Ceram. Soc. 53, 543-548 (1970).
    • (1970) J. Am. Ceram. Soc. , vol.53 , pp. 543-548
    • Wiederhorn, S.M.1    Bolz, L.H.2
  • 13
    • 0015299997 scopus 로고
    • A chemical interpretation of static fatigue
    • Wiederhorn, S. M. A chemical interpretation of static fatigue. J. Am. Ceram. Soc. 55, 81-85 (1972).
    • (1972) J. Am. Ceram. Soc. , vol.55 , pp. 81-85
    • Wiederhorn, S.M.1
  • 14
    • 0019898001 scopus 로고
    • A molecular interpretation of stress corrosion in silica
    • Michalske, T. A. & Freiman, S. W. A molecular interpretation of stress corrosion in silica. Nature, 295, 511-512 (1982).
    • (1982) Nature , vol.295 , pp. 511-512
    • Michalske, T.A.1    Freiman, S.W.2
  • 16
    • 0031099165 scopus 로고    scopus 로고
    • Subcritical crack- growth behavior of borosilicate glass under cyclic loads: Evidence of a mechanical fatigue effect
    • Dill, S. J., Bennison, S. J. & Dauskardt, R. H. Subcritical crack- growth behavior of borosilicate glass under cyclic loads: Evidence of a mechanical fatigue effect.;. Am. Ceram. Soc. 80, 773-776 (1997).
    • (1997) Am. Ceram. Soc. , vol.80 , pp. 773-776
    • Dill, S.J.1    Bennison, S.J.2    Dauskardt, R.H.3
  • 19
    • 0001630558 scopus 로고
    • Kinetics of indentation cracking in glass
    • Cook, R. F. & Liniger, E. G. Kinetics of indentation cracking in glass. J. Am. Ceram. Soc. 76, 1096-1103 (1993).
    • (1993) J. Am. Ceram. Soc. , vol.76 , pp. 1096-1103
    • Cook, R.F.1    Liniger, E.G.2
  • 20
    • 0027677897 scopus 로고
    • A chemical kinetics model for glass fracture
    • Michalske, T. A. & Bunker, B. C. A chemical kinetics model for glass fracture. J. Am. Ceram. Soc. 76, 2613-2618 (1993).
    • (1993) J. Am. Ceram. Soc. , vol.76 , pp. 2613-2618
    • Michalske, T.A.1    Bunker, B.C.2
  • 21
    • 0039763168 scopus 로고
    • Environmental crack and craze growth phenomena in polymers
    • Williams, J. G. & Marshall, G. P. Environmental crack and craze growth phenomena in polymers. Proc. R. Soc. Lond. A 342, 55-77 (1975).
    • (1975) Proc. R. Soc. Lond. A , vol.342 , pp. 55-77
    • Williams, J.G.1    Marshall, G.P.2
  • 22
    • 0020708196 scopus 로고
    • Slow stable crack-growth in high-density polyethylenes
    • Chan, M. K. V. & Williams, J. G. Slow stable crack-growth in high-density polyethylenes. Polymer 24, 234-244 (1983).
    • (1983) Polymer , vol.24 , pp. 234-244
    • Chan, M.K.V.1    Williams, J.G.2
  • 23
    • 85029187068 scopus 로고    scopus 로고
    • (eds Clement, I. J., Keller, R. R., Krisch, K. S., Sanchez, J. E. Jr, & Suo, Z.) (Materials Research Society, San Francisco, California)
    • Lane, M. et al. in Materials Reliability in Microelectronics VII Symposium (eds Clement, I. J., Keller, R. R., Krisch, K. S., Sanchez, J. E. Jr, & Suo, Z.) 21-26 (Materials Research Society, San Francisco, California, 1997).
    • (1997) Materials Reliability in Microelectronics VII Symposium , pp. 21-26
    • Lane, M.1
  • 24
    • 0037165921 scopus 로고    scopus 로고
    • Subcritical debonding of polymer/silica interfaces under monotonie and cyclic loading
    • Snodgrass, J. M., Fantelidis, D., Jenkins, M. L., Bravman, J. C. & Dauskardt, R. H. Subcritical debonding of polymer/silica interfaces under monotonie and cyclic loading. Acta Mater. 50, 2395-2411 (2002).
    • (2002) Acta Mater. , vol.50 , pp. 2395-2411
    • Snodgrass, J.M.1    Fantelidis, D.2    Jenkins, M.L.3    Bravman, J.C.4    Dauskardt, R.H.5
  • 25
    • 0036470469 scopus 로고    scopus 로고
    • Moisture assisted subcritical debonding of a polymer/metal interface
    • Kook, S. Y. & Dauskardt, R. H. Moisture assisted subcritical debonding of a polymer/metal interface. J. Appl. Phys. 91, 1293-1303 (2002).
    • (2002) J. Appl. Phys. , vol.91 , pp. 1293-1303
    • Kook, S.Y.1    Dauskardt, R.H.2
  • 26
    • 0034582833 scopus 로고    scopus 로고
    • Plasticity contributions to interface adhesion in thin-film interconnect structures
    • Lane, M., Dauskardt, R. H., Vainchtein, A. & Gao, H. Plasticity contributions to interface adhesion in thin-film interconnect structures, J. Mater. Res. 15, 2758-2769 (2000).
    • (2000) J. Mater. Res. , vol.15 , pp. 2758-2769
    • Lane, M.1    Dauskardt, R.H.2    Vainchtein, A.3    Gao, H.4
  • 28
    • 0015616877 scopus 로고
    • Effect of electrolyte pH on crack propagation in glass
    • Wiederhorn, S. M. & Johnson, H. Effect of electrolyte pH on crack propagation in glass. J. Am. Ceram. Soc. 56, 192-197 (1973).
    • (1973) J. Am. Ceram. Soc. , vol.56 , pp. 192-197
    • Wiederhorn, S.M.1    Johnson, H.2
  • 30
    • 0023437980 scopus 로고
    • Steric effects in stress corrosion fracture of glass
    • Michaiske, T. A. & Bunker, B. C. Steric effects in stress corrosion fracture of glass. J. Am. Ceram. Soc. 70, 780-784 (1987).
    • (1987) J. Am. Ceram. Soc. , vol.70 , pp. 780-784
    • Michaiske, T.A.1    Bunker, B.C.2
  • 33
    • 0019049753 scopus 로고
    • Micromechanisms of crack growth in ceramics and glasses in corrosive environments
    • Wiederhorn, S. M., Fuller, E. R. J. & Thomson, R. Micromechanisms of crack growth in ceramics and glasses in corrosive environments. Met. Sci. 14, 450-458 (1980).
    • (1980) Met. Sci. , vol.14 , pp. 450-458
    • Wiederhorn, S.M.1    Fuller, E.R.J.2    Thomson, R.3
  • 34
    • 0037182850 scopus 로고    scopus 로고
    • The nature and transport mechanism of hydrated hydroxide ions in aqueous solution
    • Tuckerman, M., Marx, D. & Parrinello, M. The nature and transport mechanism of hydrated hydroxide ions in aqueous solution. Nature 417, 925-929 (2002).
    • (2002) Nature , vol.417 , pp. 925-929
    • Tuckerman, M.1    Marx, D.2    Parrinello, M.3
  • 35
    • 0037862197 scopus 로고
    • Bond dissociation energies by kinetic methods
    • Kerr, J. A. Bond dissociation energies by kinetic methods. Chem. Rev. 66, 465-500 (1966).
    • (1966) Chem. Rev. , vol.66 , pp. 465-500
    • Kerr, J.A.1
  • 36
    • 0141519329 scopus 로고    scopus 로고
    • Interface separation in residually-stressed thin film structures
    • Strohband, S. & Dauskardt, R. H. Interface separation in residually-stressed thin film structures. Interface Sci. 11, 309-17 (2003).
    • (2003) Interface Sci. , vol.11 , pp. 309-317
    • Strohband, S.1    Dauskardt, R.H.2
  • 37
    • 0036503820 scopus 로고    scopus 로고
    • Structural, electrical, and mechanical properties development during curing of low-k hydrogen silsesquioxane films
    • Toivola, Y., Thurn, J. & Cook, R. F. Structural, electrical, and mechanical properties development during curing of low-k hydrogen silsesquioxane films. J. Electrochem. Soc. 149, F9-F17 (2002).
    • (2002) J. Electrochem. Soc. , vol.149
    • Toivola, Y.1    Thurn, J.2    Cook, R.F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.