XPS investigation of BxNyCz coatings deposited by laser assisted chemical vapour desposition

Surface and Coatings Technology

Volumn 100-101, Issue 1-3, 1998, Pages 398-403

  Oliveira, M N ^a   Botelho Do Rego, A M ^b   Conde, O ^a  

^a UNIVERSITY OF LISBON   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

Boron carbide; Boron carbonitride; Boron nitride; Laser chemical vapour deposition (LCVD)

Indexed keywords

AMINES; AMMONIA; BORON COMPOUNDS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; CONTINUOUS WAVE LASERS; CRYSTAL STRUCTURE; ETHANE; LASER APPLICATIONS; STOICHIOMETRY; X RAY CRYSTALLOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

BORON CARBIDE; BORON CARBONITRIDE; BORON NITRIDE; DIBORANE; DIMETHYLAMINE; ELECTRON PROBE MICROANALYSIS (EPMA); GLANCING INCIDENCE X RAY DIFFRACTION ANALYSIS; LASER ASSISTED CHEMICAL VAPOR DEPOSITION (LCVD);

CERAMIC COATINGS;

EID: 19244378001     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00656-7     Document Type: Article

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