RF MEMS technology

IEEJ Transactions on Electrical and Electronic Engineering

Volumn 2, Issue 3, 2007, Pages 249-261

  Kim, Hyeon Cheol ^a   Chun, Kukjin ^a  

^a Seoul National University   (South Korea)

Author keywords

High Q inductor; High Q resonator; RF MEMS switch; RF MEMS technology

Indexed keywords

COMMUNICATION CHANNELS (INFORMATION THEORY); MEMS; MOBILE PHONES; RESONATORS; TRANSCEIVERS; VARIABLE FREQUENCY OSCILLATORS;

HIGH-Q INDUCTOR; HIGH-Q RESONATOR; RF MEMS SWITCH; RF MEMS TECHNOLOGY;

OPTICAL COMMUNICATION;

EID: 34248213667     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.20139     Document Type: Article

References (49)

1. De Los Santos H.J. RF MEMS Circuit Design for Wireless Communications. Artech House: Boston London, 2002.
2. Kim YK, Prasad R. 4G Roadmap and Emerging Communication Technologies. Artech House: Boston London, 2005.
3. Rebeitz GM. RF MEMS Theory, Design, and Technology. John Wiley & Sons, Inc.,: Hoboken, New Jersey, 2003; ISBN:0-471-20169-3.
4. Brown ElliottR. RF-MEMS switches for reconfigurable integrated circuits. IEEE Transactions on Microwave Theory and Techniques 1998; 46(11):1868-1880.
5. DeNatale J. Reconfigurable RF circuits based on integrated MEMS switches. IEEE International Solid-State Circuits Conference 2004, Part Vol. 1, San Francisco, CA, 310-311.
6. Kim M, Hacker JB, Mihailovich RE, DeNatale JF. A monolithic MEMS switched dual-path power amplifier. IEEE Microwave and Wireless Component Letters 2001; 11:285-286.
7. Wecdon WH, Payne WI, Rabeir GM, Herd JS, Champion M. MEMS switched reconfigurable multi-band antenna: design and modeling. In Proceedings of the Antenna applications Symposium, Monticello, 11. September 1999.
8. Rebeiz GM, Muldavin JB. RF MEMS switches and switch circuits. IEEE Microwave Magazine 2001; 2:59-71.
9. http://www.teledynerelays.com/pdf/electromechanical/rf300rf303.pdf, RF303 data sheet.
10. http://www.cotorelay.com/RF_Graphs.pdf, Coto 9802 data sheet.
11. http://www.mcekdi-integrated.com/pdfiles/swx.pdf, MCE SWX-04 data sheet.
12. http://www.cel.com/pdf/datasheets/upd5710tk.pdf, UPD5710TK data sheet.
13. http://www.teravicta.com/admin/assetmanager/images/ 6_app_i_ds_tt_712_68csp_eb_2.2.pdf, TeraVicta TT712 data sheet.
14. Hyman D, Mehregany M. Contact physics of gold micro contacts for MEMS switches. Ieee Transactions on Components and Packaging Technologies 1999; 22:357-364.
15. Yao J, Chang M. A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz. In Proceedings Transducers'95, Stockholm, Denmark, 1995; 384-387.
16. Hyman D, Lam J, Warneke B, Schmitz A, Hsu TY, Brown J, Schaffner J, Walston A, Loo RY, Mehregany M, Lee J. Surface-micromachined RF MEMS switches on GaAs substrate. International Journal of RF and Microwave Computer-aided Engineering 1999; 9:348-361.
17. Goldsmith CL, Yao Z, Eshelman S, Denniston D. Performance of Low-Loss RF MEMS Capacitive Switches. IEEE Microwave and Guided Wave Letters 1998; 8:269-271.
18. Yao ZJ, Chen S, Eshelman S, Dennison D, Goldsmith C. Micromachined low-loss microwave switches. Journal of Microelectromechanical Systems 1999; 8(2):129-134.
19. Komura Y, Sakata M, Seki T, Kobayashi K, Sano K, Horiike S, Ozawa K. Micro machined relay for high frequency application. In Proceedings NARM Int. Relay Conferences, Newport Beach, Apr. 19-21, 1999.
20. Hah D, Yoon E, Hong S. A low-voltage actuated micromachined microwave switch using torsion springs and leverage. IEEE Transactions on Microwave Theory and Techniques 2000; 48:2540-2545.
21. Cho IJ, Song T, Baek SH, Yoon E. A low-voltage and low-power RF MEMS series and shunt switches actuated by combination of electromagnetic and electrostatic forces IEEE Transactions on Microwave Theory and Techniques 2005; 53(7):2450-2457.
22. Taylor WP, Brand O, Allen MG. Fully integrated magnetically actuated micromachined relays. Journal of Microelectromechanical Systems 1998; 7:181-191.
23. Ruan M, Shen J, Wheeler CB. Latching micromagnetic relays. Journal of Microelectromechanical Systems 2001; 10(6):511-517.
24. Lee HC, Park JY, Bu JU. Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation. IEEE Microwave and Wireless Component Letters 2005; 15(4):202-204.
25. Wang Y, Li Z, McCormick DT, Tien NC. A low-voltage lateral MEMS switch with high RF performance. Journal of Microelectromechanical Systems 2004; 13(6):902-911.
26. Lee J, Je CH, Kang S, Choi CA. A low-loss single-pole six-throw switch based on compact RF MEMS switches. IEEE Transactions on Microwave Theory and Techniques 2005; 53(11):3335-3344.
27. Tan GL, Mihailovich RE, Hacker JB, DeNatale JF, Rebeiz GM. Low-loss 2-and 4-bit TTD MEMS phase shifters based on SP4T switches. IEEE Transactions on Microwave Theory and Techniques 2003; 51(1):297-304.
28. Liu AQ, Palei W, Tang M, Alphones A. Single-pole-four-throw switch using high-aspect-ratio lateral switches. Electronics Letters 2004; 40(18):1125-1126.
29. Groves R, Malinowski J, Volant R, Jadus D. High Q Inductors in a SiGe BiCMOS Process Utilizing a thick Metal Process Add-on Module. IEEE BCTM: Minneapolis, MN, 1999; 149-152.
30. Carchon G, Raedt WD. Integrated Inductors in Integrated Passive Component Technology. by IEEE Press: ISBN 0471244317, Chapter 10, 2003.
31. Yue CP, Wong SS. On-chip spiral inductors with patterned ground shields for Si-based RF ICs. IEEE Journal of Solid-State Circuits 1998; 33(5):743-752.
32. Yoon J-B, Kim B-K, Han C-H, Yoon E, Lee K, Kim C-K. High-performance Electroplated Solenoid-type Integrated Inductor (S12) for RF Applications using Simple 3D Surface Micromachining Technology. IEDM'98 Technical Digest.: 1998; 544-547.
33. Kim Y-J, Allen MG. Surface micromachined solenoid inductors for high frequency applications. IEEE Transactions on Components Packaging and Manufacturing Technology Part C 1998; 21(1):26-33.
34. Dahlmann GW, Yeatman EM, Young PR, Robertson ID, Lucyszyn S. MEMS high Q microwave inductors using solder surface tension self-assembly. 2001 IEEE MTT-S Microwave Symposium Digest 2001; 1:329-332.
35. Van Schuylenbergh K, Chua CL, Fork DK, Lu J-P, Griffiths B. On-chip out-of-plane high-Q inductors. In IEEE Proceedings of Lester Eastman Conference on High Performance Devices 2002, Newark, NJ, 2002; 364-373.
36. Huo X, Chen KJ, Chan PCH. Silicon-based high-Q inductors incorporating electroplated copper and low-K BCB dielectric. IEEE Electron Device Letters 2002; 23(9):520-522.
37. Mernyei F, Darrer F, Pardoen M, Sibrai A. Reducing the substrate losses of RF integrated inductors. IEEE Microwave and Guided Wave Letters 1998; 8(9):300-301.
38. Lee JY, Kim JH, Moon SS, Kim IH, Lee YH, Yook JK, Chun K. An interference on SiGe 5 GHZ VCOs integrated with inductors using low-K BCB dielectric TENCON 2004. In IEEE Region 10 Conference, Chianmai, Tailand, Volume D, 21-24, 2004; 151-154.
39. Nathanson HC, Wickstrom RA. A resonant-gate silicon surface transistor with high-Q bandpass properties. Applied Physics Letters 1965; 7:84-86.
40. Petersen KE. Silicon as a mechanical material. Proceedings of the IEEE 1982; 70(5):420-457.
41. Partridge A, Lutz M, Kim B, Hopcroft M, Candler RN, Kenny TW, Petersen K, Esashi M. MEMS Resonators: Getting the Packaging Right SEMICON-Japan, 2006.
42. Bannon FD, Clark JR, Nguyen CT-C. High-Q HF microelectomechanical filters. IEEE Journal of Solid-State Circuits 2000; 35(4):512-526.
43. Ruther P, Bartholomeyczik J, Buhmann A, Trautmann A, Steffen K, Paul O. Microelectromechanical HF resonators fabricated using a novel SOI-based low-temperature process. IEEE Sensors Journal 2005; 5:1112-1119.
44. Nguyen CT-C, Howe RT. CMOS micromechanical resonator oscillator technical digest. In IEEE International Electron Devices Meeting, Washington, DC, December 5-8, 1993; 199-202.
45. Lin Y-W, Lee SOS, Li S, Xie Y, Ren Z, Nguyen CTOC. Series-resonant VHF micromechanical resonator reference oscillators. IEEE Journal of Solid-State Circuits 2004; 39(12):2477-2491.
46. Nguyen CT-C. Vibrating RF MEMS for next generation wireless applications. In Proceedings, 2004 IEEE Custom Integrated Circuits Conference, Orlando, FL, Oct. 3-6, 2004; 257-264.
47. Kim B, Candler RN, Hopcroft M, Agarwal M, Park WT, Li J, Kenny TW. Investigation of MEMS resonator characteristics during long-term and wide temperature variation operation. In Proceedings ASME Int. Mechanical Engineering Congr. RD&D Expo., Anaheim, CA, 2004; 413-416.
48. Candler RN, Park WT, Hopcroft M, Kim B, Kenny TW. Hydrogen diffusion and pressure control of encapsulated MEMS resonators Transducers '05, 2005; 920-923.
49. Kim B, Candler RN, Hopcroft M, Agarwal M, Park WT, Kenny TW. Frequency stability of wafer-scale encapsulated MEMS resonators, Transducers '05, 2005; 1965-1968.