A low-loss single-pole six-throw switch based on compact RF MEMS switches

IEEE Transactions on Microwave Theory and Techniques

Volumn 53, Issue 11, 2005, Pages 3335-3344

  Lee, Jaewoo ^a,b,c,d,e   Je, Chang Han ^a,b,c,f   Kang, Sungweon ^a,b,g,h   Choi, Chang Auck ^b,i  

^a Electronics and Telecommunications Research Institute ^*

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^c Engineering Staff   (South Korea)

^d Basic Research Laboratory   (South Korea)

^e IEEE   (Japan)

^f Microsystems Research Department   (South Korea)

^g Semiconductor Department   (South Korea)

^h Semiconductor Equipment and Materials Institute   (South Korea)

ⁱ ETRL   (South Korea)

Author keywords

Microelectromechanical devices; Modeling; Parameter estimation; Switches

Indexed keywords

ELECTRIC SWITCHES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION;

METAL CONTACTS; MODELING; PARAMETER-EXTRACTION METHOD;

SWITCHING;

EID: 28144436301     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2005.855746     Document Type: Conference Paper

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