Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

IEEE Microwave and Wireless Components Letters

Volumn 15, Issue 4, 2005, Pages 202-204

  Lee, Hee Chul ^a   Park, Jae Yeong ^a   Bu, Jong Uk ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

Cantilever actuator; De contact; Low voltage operation; Piezoelectric; Radio frequency (RF) microelectromechanical system (MEMS) switch

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTRODES; FREQUENCIES; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; SILICON; SUBSTRATES;

CANTILEVER ACTUATORS; DC CONTACT; LOW-VOLTAGE OPERATIONS; PIEZOELECTRIC; RADIO FREQUENCY (RF);

SWITCHES;

EID: 18144386953     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2005.845689     Document Type: Article

References (7)

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