An interference on SiGe 5GHz VCOS integrated with inductors using low-k BCB dielectric

IEEE Region 10 Annual International Conference, Proceedings/TENCON

Volumn D, Issue , 2004, Pages

  Lee, J Y ^a   Kim, J H ^a   Moon, S S ^a   Kim, I H ^a   Lee, Y H ^b   Yook, J K ^b   Chun, K ^a  

^a Seoul National University   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC INDUCTORS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SPURIOUS SIGNAL NOISE;

MEMS INDUCTORS; PHASE NOISE; SIGE INDUCTORS; VCO CIRCUITS;

VARIABLE FREQUENCY OSCILLATORS;

EID: 27944479018     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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5. J. B. Yoon et al, "High performance three dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC," IEEE Int. Microwave Symposium Digest, pp. 1523-1526, June 1999.
6. Y.J. Park and M. G. Alien, "High Q spiral type micro inductors on silicon substrates," IEEE Trans. Magn., vol. 35, pp.3544-3546, September 1999.
7. J. Zou, J. G. Nickel, D. Traninor, C. Liu, and J.E. Schutt-Aine, "Development of vertical planar coil inductors using plastic deformation magnetic assembly(PDMA)," IEEE Int. Microwave Symposium Digest, pp. 193-196, June 2001.