Characterization of density profile of laser-produced Sn plasma for 13.5 nm extreme ultraviolet source

Applied Physics Letters

Volumn 86, Issue 20, 2005, Pages 1-3

  Tao, Y ^a   Nishimura, H ^a   Fujioka, S ^a   Sunahara, A ^b   Nakai, M ^a   Okuno, T ^a   Ueda, N ^a   Nishihara, K ^a   Miyanaga, N ^a   Izawa, Y ^a  

^a OSAKA UNIVERSITY   (Japan)

^b INSTITUTE FOR LASER TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; HYDRODYNAMICS; INTERFEROMETERS; LASERS; LIGHT SOURCES; TIN; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET (EUV) EMISSION; HYDRODYNAMIC SIMULATION CODES; OPACITY EFFECTS; PLASMA EXPANSION;

PLASMA THEORY;

EID: 20844431711     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1931825     Document Type: Article

References (11)

1. R. Service, Science 293, 785 (2001).
2. R. C. Spitzer, T. J. Orzechowski, D. W. Phillion, R. L. Kauffman, and C. Cerjana, J. Appl. Phys. 79, 2251 (1996);
3. H. Komori, T. Abe, T. Suganuma, Y. Imai, Y. Sugimoto, H. Someya, H. Hoshino, G. Soumagne, Y. Takabayashi, H. Mizoguchi, A. Endo, K. Toyoda, and Y. Horiike, J. Vac. Sci. Technol. B 21, 2843 (2003).
4. Y. Shimada, H. Nishimura, M. Nakai, K. Hashimoto, M. Yamaura, Y. Tao, K. Shigemori, T. Okuno, K. Nishihara, T. Kawamura, A. Sunahara, T. Nishikawa, H. A. Sasaki, K. Nagai, T. Norimatsu, S. Fujioka, S. Uchida, N. Miyanaga, Y. Izawa, and C. Yamanaka, Appl. Phys. Lett. 86, 051501 (2005).
5. K. Nagai, H. Nishimura, T. Okuno, T. Hibino, R. Matsui, Y. Tao, M. Nakai, T. Norimatsu, N. Miyanaga, K. Nishihara, and Y. Izawa, Trans. Mater. Res. Soc. Jpn. 29, 943 (2004).
6. M. Richardson, C. Koay, K. Takenoshita, C. Keyser, and M. Al-Rabban, J. Vac. Sci. Technol. B 22, 785 (2004).
7. A. Sunahara, K. Nishihara, and EUV project group, Annual Progress Report, Institute of Laser Engineering, Osaka University, Osaka, Japan, ILE-March-2004, 2004, p. 34.
8. Y. Tao, F. Sohbatzadeh, H. Nishimura, R. Matsui, T. Hibino, T. Okuno, S. Fujioka, K. Nagai, T. Norimatsu, K. Nishihara, N. Miyanaga, Y. Izawa, A. Sunahara, and T. Kawamura, Appl. Phys. Lett. 85, 1919 (2004).
9. V. Malka, C. Coulaud, J. P. Geindre, V. Lopez, Z. Najmudin, D. Neely, and F. Amiranoff, Rev. Sci. Instrum. 71, 2329 (2000).
10. http:optics.tu-graz.ac.at
11. Y. Tao, M. Nakai, H. Nishimura, S. Fujioka, T. Okuno, T. Fujiwara, N. Ueda, N. Miyanaga, and Y. Izawa, Rev. Sci. Instrum. 75, 5173 (2004).