A micromachined piezoelectric ultrasonic transducer operating in d 33 mode using square interdigital electrodes

IEEE Sensors Journal

Volumn 7, Issue 7, 2007, Pages 967-975

  Wang, Chao ^b,c   Wang, Zheyao ^b   Ren, Tian Ling ^a,b   Zhu, Yiping ^b   Yang, Yi ^b   Wu, Xiaoming ^b   Wang, Haining ^b   Fang, Huajun ^b   Liu, Litian ^b  

^a IEEE

^b TSINGHUA UNIVERSITY   (China)

^c Princeton University   (United States)

Author keywords

D33 mode; Directivity; In plane polarization; Interdigital electrode (IDE); PZT; Ultrasonic transducer

Indexed keywords

CAPACITANCE; ELECTRODES; FINITE ELEMENT METHOD; PIEZOELECTRIC TRANSDUCERS; POLARIZATION; THIN FILMS;

IN PLANE POLARIZATION; IN PLANE STRESSES; INTERDIGITAL ELECTRODE (IDE); SQUARE INTERDIGITAL ELECTRODES (IDE);

ULTRASONIC TRANSDUCERS;

EID: 34247583491     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2007.896562     Document Type: Article

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