A new detection method for capacitive micromachine ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 48, Issue 4, 2001, Pages 932-942

  Sanh Ergun, A ^a,b   Temelkuran, Burak ^c   Ozbay, Ekmel ^a,d   Atalar, Abdullah ^a,d  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^d BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS; ELECTRICAL LENGTH; ULTRASOUND FREQUENCY;

CAPACITANCE; CAPACITORS; DEMODULATION; ELECTRIC INDUCTORS; ELECTRIC VARIABLES MEASUREMENT; ELECTRODES; MATHEMATICAL MODELS; SIGNAL DETECTION; ULTRASONICS; VIBRATIONS (MECHANICAL);

ULTRASONIC TRANSDUCERS;

ARTICLE;

EID: 0035384775     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.935710     Document Type: Article

References (25)

1. A surface micromachined electrostatic ultrasonic air transducer
2. Micromachined ultrasonic transducers: 11.4 mhz transmission in air and more
3. Silicon micromachined ultrasonic immersion transducers
4. The design and characterization of micromachined air-coupled capacitance transducers
5. A silicon electrostatic ultrasonic transducer
6. Highly integrated 2-d capacitive micromachined ultrasonic transducers
7. Surface micromachined ultrasound transducers in cmos technology
8. Defect imaging by micromachined ultrasonic air transducers
9. Simulation and experimental characterization of a 2-d capacitive micromachined ultrasonic transducer array element
10. Simulation and experimental characterization of a 2-d, 3-mhz capacitive micromachined ultrasonic transducer (cmut) array element
11. Characteristics of ultrasonic micromachined capacitance transducers in water
12. Silicon micromachined ultrasonic transducers
13. Surface micromachined capacitive ultrasonic transducers
14. The microfabrication of capacitive ultrasonic transducers
15. Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers
16. A sensitive detection method for capacitive ultrasonic transducers
17. A new detection method for capacitive micromachined ultrasonic transducers
18. A new detection method for capacitive micromachined ultrasonic transducers
19. Characteristics of micromachined switches at microwave frequencies
20. Distributed mems true-time delay phase shifters and wideband switches
21. Surface micromachined pressure sensors with integrated cmos read-out electronics
22. A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity