Improved electrical properties using SrTiO3/Y2O3 bilayer dielectrics for MIM capacitor applications

Microelectronics Reliability

Volumn 47, Issue 4-5 SPEC. ISS., 2007, Pages 773-776

  Kahn, Maurice ^a   Vallée, Christophe ^a   Defay, Emmanuel ^b   Dubourdieu, Catherine ^c   Bonvalot, Marceline ^a   Blonkowski, Serge ^d   Plaussu, Jean Raoul ^a   Garrec, Pierre ^b   Baron, Thierry ^a  

^a Université Joseph Fourier   (France)

^b CEA LETI   (France)

^c MINATEC   (France)

^d STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; CAPACITORS; ELECTRIC PROPERTIES; MOLECULAR STRUCTURE; PERMITTIVITY; STRONTIUM COMPOUNDS;

CAPACITANCE DENSITY; CAPACITANCE VOLTAGE LINEARITY; DIELECTRIC BILAYERS; PERMITTIVITY-VOLTAGE RESPONSES;

DIELECTRIC MATERIALS;

EID: 34247328647     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2007.01.029     Document Type: Article

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