The effect of the gold sputter-coated films in minimising damage in FIB-produced TEM specimens

Materials Letters

Volumn 57, Issue 15, 2003, Pages 2238-2241

  Rubanov, S ^a   Munroe, P R ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Electron microscopy; FIB; InAs; Ion beam technology; Sputter coating; Superlattice

Indexed keywords

ION BEAMS; METALLIC FILMS; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAMS (FIB);

SEMICONDUCTOR SUPERLATTICES;

EID: 0037381418     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(02)01202-8     Document Type: Article

References (7)

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