Development of micromachined RF switches with piezofilm actuation

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4700, Issue , 2002, Pages 40-49

  Fox, Colin H J ^a   Chen, Xuesheng ^a   Jiang, Hong Wen ^b   Kirby, Paul B ^b   McWilliam, Stewart ^a  

^a UNIVERSITY OF NOTTINGHAM   (United Kingdom)

^b CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

MEMS; PZT; RF switches

Indexed keywords

CANTILEVER BEAMS; ELECTROSTATIC ACTUATORS; IMPEDANCE MATCHING (ELECTRIC); MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRIC MATERIALS; THIN FILMS;

MICRO-SWITCHES;

ELECTRIC SWITCHES;

EID: 0036031391     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.475052     Document Type: Article

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