A shunt-type RF MEMS switch at 3.3V operation actauted by Lorentz force and electrostatic hold

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 1051-1054

  Cho, Il Joo ^a   Song, Taeksang ^a   Baek, Sang Hyun ^a   Yoon, Euisik ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Electromagnetic actuation; Electrostatic actuation; RF MEMS switch; Shunt

Indexed keywords

ACTUATORS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; ELECTROSTATICS; ENERGY UTILIZATION;

ELECTROMAGNETIC ACTUATION; ELECTROSTATIC ACTUATION; RF MEMS SWITCH; SHUNT;

MICROELECTROMECHANICAL DEVICES;

EID: 27544464361     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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5. I-.J. Cho, T. Song, S-.H. Back and E. Yoon, "A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces", Proc. 34th European Microwave Conf., Amstemam, Netherland, Oct., 2004.
6. I-.J. Cho, T. Song, S-.H. Back and E. Yoon, "A Low-Voltage Push-Pull SPDT RF MEMS Switch Operated By Combination Of Electromagnetic Actuation And Electrostatic Hold", Proc. IEEE MEMS Conf., Miami, pp. 32-35, Jan., 2005.
7. J. B. Muldavin and G. M. Rebeiz, "High isolation CPW MEMS shunt switches - Part 1: Modeling", IEEE Transactions On Microwave Theory and Techniques, vol. 48, no. 6, pp. 1045-1052, June 2000.
8. J. B. Muldavin and G. M. Rebeiz, "Movel series and shunt MEMS switch geometries for X-band applications", Proc. 30 th European Microwave Conf, Paris, pp. 512-515, Oct., 2000.