Use of silane for the deposition of hard and oxidation resistant Ti-Si-N coatings by a hybrid cathodic arc and chemical vapour process

Materials Letters

Volumn 61, Issue 11-12, 2007, Pages 2506-2508

  Pilloud, D ^a   Pierson, J F ^b   Steyer, P ^c   Mege, A ^c   Stauder, B ^d   Jacquot, P ^d  

^a FEMTO ST INSTITUTE   (France)

^b INSTITUT JEAN LAMOUR   (France)

^c UNIVERSITÉ DE LYON   (France)

^d Bodycote   (France)

Author keywords

Hardness; Nanocomposites; Oxidation resistance; Structure; Thin films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; NANOCOMPOSITES; OXIDATION RESISTANCE; SILANES; SILICON; THIN FILMS; TITANIUM;

DEPTH SENSING INDENTATION; HYBRID CATHODIC ARCS; MEAN GRAIN SIZE;

COATED MATERIALS;

EID: 34147200100     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2006.09.046     Document Type: Article

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