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Thin Solid Films

Volumn 496, Issue 2, 2006, Pages 445-449

Structure and tribological properties of reactively sputtered Zr-Si-N films

(3) Pilloud, D a Pierson, J F a,c Takadoum, J b

a FEMTO ST INSTITUTE (France)

b Centre National de la Recherche Scientifique (France)

c INSTITUT JEAN LAMOUR (France)

Author keywords

Nanocomposite; Sputtering; Structure; Tribology

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; COMPOSITION; MICROANALYSIS; NANOSTRUCTURED MATERIALS; SILICON; SILICON NITRIDE; STEEL; TRIBOLOGY; WEAR OF MATERIALS; ZIRCONIUM COMPOUNDS;

FILM STRUCTURE; SILICON CONCENTRATION; TEXTURE MODIFICATION;

THIN FILMS;

EID: 28144459612 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.09.062 Document Type: Article

Times cited : (21)

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