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Volumn 182, Issue 2-3, 2004, Pages 204-214

Comparative investigation of Ti-Si-N films magnetron sputtered using Ti5Si3+Ti and Ti5Si3+TiN targets

(7) Shtansky, D V a Lyasotsky, I V b D'yakonova, N B b Kiryukhantsev Korneev, F V a Kulinich, S A a Levashov, E A a Moore, J J c

a NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS (Russian Federation)

b BARDIN CENTRAL RESEARCH INSTITUTE OF FERROUS METALLURGY (Russian Federation)

c Department of Geology and Geological Engineering (United States)

Author keywords

Hardness; Magnetron sputtering; Nanostructured thin films; SHS composite targets; Structure; Ti Si N coatings; Wear; Young's modulus

Indexed keywords

ARGON; AUGER ELECTRON SPECTROSCOPY; ELASTIC MODULI; FRICTION; HARDNESS; MAGNETRON SPUTTERING; MICROSTRUCTURE; SURFACE TOPOGRAPHY; SYNTHESIS (CHEMICAL); TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

FRICTION COEFFICIENTS; GASEOUS MIXTURES; NANOINDENTATION;

METALLIC FILMS;

COATING;

EID: 2142815379 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.08.052 Document Type: Article

Times cited : (42)

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