Time-efficient quasi-static algorithm for simulation of complex single-sided clamped electrostatic actuators

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 373-382

  Oberhammer, Joachim ^a   Liu, A Q ^b   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Curved electrode actuator; Design optimization; Electrostatic actuator; MEMS simulation; Microelectromechanical systems (MEMS) design; Quasi static modeling; Touch mode actuator

Indexed keywords

DESIGN; FINITE ELEMENT METHOD; MATLAB; MEMS; OPTIMIZATION; THIN FILM DEVICES;

QUASI-STATIC MODELING; TOUCH-MODE ACTUATOR;

ELECTROSTATIC ACTUATORS;

EID: 34147181734     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.892917     Document Type: Article

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