Fabrication of an S-shaped microactuator

Journal of Microelectromechanical Systems

Volumn 6, Issue 1, 1997, Pages 18-24

  Shikida, Mitsuhiro ^a,b,c,d   Sato, Kazuo ^a,b,e,f,g   Harada, Takeshi ^b,h,i  

^a NAGOYA UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

^c SEIKEI UNIVERSITY   (Japan)

^d Institute of Electrical Engineers of   (Japan)

^e YOKOHAMA NATIONAL UNIVERSITY   (Japan)

^f UNIVERSITY OF TOKYO   (Japan)

^g Japan Society of Mechanical Engineers   (Japan)

^h OSAKA UNIVERSITY   (Japan)

ⁱ JAPAN SOCIETY OF APPLIED PHYSICS   (Japan)

Author keywords

Electrostatic devices; Fabrication; Microactuator

Indexed keywords

CONDUCTIVE FILMS; ELECTRIC FIELDS; ELECTRODES; ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; NICKEL; VALVES (MECHANICAL);

ELECTRODE PLATES; ELECTROSTATIC FORCE; FILM ELEMENT; GAS VALVES; MICROACTUATORS; S BEND PROFILE; VERTICAL FILM DISPLACEMENT;

ACTUATORS;

EID: 0031098221     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.557526     Document Type: Article

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