A low power, tight seal, polyimide electrostatic microvalve

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 59, Issue , 1996, Pages 345-349

  Lee, Abraham P ^a   Hamilton, Julie ^a   Trevino, Jimmy ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATICS; ETCHING; MICROELECTROMECHANICAL DEVICES; POLYIMIDES; RESIDUAL STRESSES; SEMICONDUCTING SILICON;

BUILT IN RESIDUAL STRESSES; ELECTROSTATICALLY ACTUATED POLYIMIDE MICROVALVES;

VALVES (MECHANICAL);

EID: 0342502741     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)

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8. Lammerink, T.S.J., Elwenspoek, M., Fluitman, J.H.J., "Integrated Micro-Liquid Dosing System," Proc. 6th IEEE Workshop on Micro Electro Mechanical Systems, 1993, pp.254-259.
9. Sato K. and Shikida M., "Electrostatic Film Actuator with a Large Vertical Displacement," Proc. of Micro Electro Mechanical Systems, Travemünde, Germany, Feb.4-7, 1992, pp. 1-5.
10. Shikida M., Sato K., Takeshita K., and Suzuki S., "Response Time Measurement of Electrostatic S-Shaped Film Actuator Related to Environmental Gas Pressure Conditions," Proc. of IEEE ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego California, U.S.A., Feb. 11-15, 1996, pp.210-215.
11. Shoji, S. and Esashi, M., "Microflow Devices and Systems," Micromechanics and Microengineering, v.4, 1994, pp.157-171.
12. Vieider, C., Öhman, O., and Elderstig, Håkan, "A Pneumatically Actuated Micro Valve with Fluid-Handling Systems," Proc. of 8th International Conference on Solid-Stale Sensors and Actuators (Transducers '95), Stockholm, Sweden, pp.284-286.