Study of large bending and low voltage drive electrostatic actuator with novel shaped cantilever and electrode

Proceedings of the International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1998, Pages 161-164

  Hirai, Yoshihiko ^a   Shindo, Masaru ^a   Tanaka, Yoshio ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); ELECTRODES; ELECTROSTATIC DEVICES; POLYNOMIALS;

LOW VOLTAGE DRIVE ELECTROSTATIC ACTUATOR;

MICROACTUATORS;

EID: 0032318531     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)