New MOEMS-switch device with electrostatic actuator

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 159-160

  Thielicke, E ^a   Obermeier, E ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COATED MATERIALS; ELECTROSTATICS; MOEMS; SWITCHING CIRCUITS;

BULK- MICROMACHINING; CURVED ELECTRODE; LARGE DISPLACEMENT ACTUATOR; LINEAR MOTION; MICRO-MECHANICAL; MIRROR SURFACES; TILTING MECHANISM; TREE-STRUCTURED;

ELECTROSTATIC ACTUATORS;

EID: 84963737939     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031491     Document Type: Conference Paper

References (6)

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4. G. Perregaux, P.Weiss, B. Kloeck, H. Vuilliomenet, J.-P. Thiébaud: "High-Speed Micro-Electromechanical Light Modulation Arrays", Transducers '97
5. J. Schimkat, L. Kiesewetter, H.-J. Gevatter, F. Arndt, A. Steckenborn, H. Schlaak: "Moving Wedge Actuator: An Electrostatic Actuator for Use in a Microrelay", MST '94, Potsdam, Germany, 1994
6. R. Legtenberg, F. Berenschot, M. Elwenspoek, J. Fluitman: "Electrostatic Curved Electrode Actuators", IEEE MEMS, Amsterdam, The Netherlands, 1995