Micromechanical relay with electrostatic actuation

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1165-1168

  Schiele, Ignaz ^a   Huber, Joerg ^a   Evers, Christian ^a   Hillerich, Bernd ^a   Kozlowski, Frank ^a  

^a Fraunhofer Institut fur Festkorpertechnologie   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC CURRENTS; ELECTRIC SWITCHES; ELECTROSTATIC DEVICES; FABRICATION; MICROMACHINING; SURFACES;

ELECTROSTATIC ACTUATION; ELECTROSTATIC RELAY; MICROMECHANICAL RELAY; SURFACE MICROMACHINING TECHNOLOGY;

ELECTRIC RELAYS;

EID: 0030688099     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)