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Thin Solid Films

Volumn 405, Issue 1-2, 2002, Pages 162-169

Bias effect of ion-plated zirconium nitride film on Si(100)

(3) Chou, Wen Jun a Yu, Ge Ping a Huang, Jia Hong a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

Hardness; Preferred orientation; Resistivity; Zirconium nitride

Indexed keywords

CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTRODEPOSITION; IONS; SEMICONDUCTING SILICON; SUBSTRATES; SURFACE ROUGHNESS; ZIRCONIUM COMPOUNDS;

ZIRCONIUM NITRIDE FILMS;

THIN FILMS;

EID: 0037154927 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01762-X Document Type: Article

Times cited : (75)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.