Applications of MEMS to industrial inspection

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 182-191

  Takeda, M ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INSPECTION; MONITORING; SURFACE PROPERTIES; WATER PIPELINES;

INDUSTRIAL INSPECTION;

MICROELECTROMECHANICAL DEVICES;

EID: 0034997011     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (37)